HYT UNVEILS WINDOWS-BASED DATA SOFTWARE FOR IN SITU PARTICLE SENSORS

Particle Vision Upgrade Uses Adaptive Technology for Real-Time Information
Analysis

SUNNYVALE, Calif., JUNE 27, 1995--Pacific Scientific's High Yield
Technology (HYT) Division announced today that it has developed a
Windows-based software program that collects, displays and analyzes
real-time data from all HYT in situ particle sensors. Particle Vision ll,
an upgrade from the original DOS-only Particle Vision program, offers
significantly enhanced data collection capabilities for particle
monitoring in semiconductor production environments.

The new Particle Vision ll upgrade dramatically increases the
yield-enhancing benefits of HYT's complete particle monitoring system. One
system benefit introduced by the Particle Vision ll is its new Machine
State Trigger capability. The Machine State Trigger feature, an
advancement over the earlier program's Machine Trigger technology, now
allows particle data collection to be synchronized with up to 256 specific
states of the process equipment. Using this feature, each process step can
be tracked independently, and up to 15 sensors can be monitored
simultaneously--compared to a maximum of four sensors with the original
Particle Vision for DOS software. This capability helps ensure the
relevance of particle data and is especially critical when monitoring
multiple-step processes.

Another important benefit offered by the Particle Vision ll software is its
ability to dynamically tune each sensor. Now each sensor's tuning
parameters can be customized for each process step. These parameters are
downloaded to the controller when the machine trigger pattern is active,
and tuning can be defined for up to eight machine trigger patterns per
sensor.

Other Particle Vision II features include the availability of complete
sensor diagnostics such as PV Scope, which works as a "software
oscilloscope." PV Scope allows manufacturers to characterize process
conditions and establish optimum sensor settings. Another feature lets
users set upper control limits for particle counts and sensor diagnostic
values for statistical process control of particle levels. An additional
benefit of the Windows-based upgrade is simple data analysis off-line with
its new Microsoft Excel file format.

According to Gale Lane, product marketing manager for HYT, the new
software's Machine Trigger State and dynamic tuning offer major benefits
to HYT's customers. "Particle Vision II, with its adaptive technology,
represents a significant step forward for our customers who want real-time
solutions to their production needs," Lane said. "No other program on the
market has the power to make particle monitoring data so immediately
accessible and meaningful to its users."

In situ particle monitoring was pioneered by HYT to meet the increasingly
strict cost-of-ownership needs of today's semiconductor manufacturers. By
measuring the level of damaging particles inside the fabrication equipment
as the wafers are created, manufacturers can make real-time corrections to
reduce test time and defect densities. Test time is saved by replacing
traditional monitoring methods such as surface defect scanners with a
real-time monitoring technique. Defect density is reduced by lowering
particle levels within the system and decreasing scrap.

Particle Vision ll comes standard with the purchase of PM-200, PM-250 and
PM-255 controllers, and is also available as an upgrade to the original
Particle Vision program for $100. For more information on the Particle
Vision ll upgrade, call the HYT technical marketing department at
408/730-4585, or fax 408/730-9749.

About Pacific Scientific's High Yield Technology Division: HYT was founded
in 1985 to meet the particle and process control needs of semiconductor
device, equipment and wafer manufacturers. The company leads the industry
in two major technology areas. HYT in situ particle detection tools enable
real-time monitoring of particle levels inside vacuum production
equipment. The Optical Production Profiler looks beneath the wafer surface
to nondestructively profile defects in the wafer bulk, as well as at the
critical surface and near-surface regions of the wafer. Headquartered in
Sunnyvale, California, HYT has sales representatives operating throughout
Europe, Israel, Japan, Korea and Taiwan, with direct support in
California, the Southwest and Northeast United States and the United
Kingdom. HYT is a division of Pacific Scientific, a publicly held company
listed on the New York Stock Exchange.

High Yield Technology Division
617 Palomar Ave
Sunnyvale, CA 94086
408-730-4585,  fax 408-730-9749
 
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