SVG'S MICRASCAN II USED IN THE PRODUCTION OF WORLD'S FIRST 256 MEGABIT
DRAM

SAN JOSE, Calif., NOVEMBER 10, 1994--Silicon Valley Group Inc. (SVG)
announced today that its Micrascan II step-and-scan photolithography tool
was used by Samsung Electronics Co., Ltd. of Korea in the development of
the world's first 256 megabit dynamic random access memory (DRAM) chip.
Samsung officials report that the application and technical support
extended by SVG were a valuable contribution to the project.

SVG Chairman and Chief Executive Officer Papken Der Torossian stated that
Samsung's milestone is an indication of its position at the forefront of
global memory chip technology. "As the world's largest manufacturer of 16
megabit DRAM devices, Samsung has aggressively pursued a leadership
position in the development of next-generation memory chips. We are
pleased to have the opportunity to play a major role in this important
technology innovation."

The machine-to-machine overlay and large field size that characterize the
Micrascan II allow manufacturers like Samsung to meet the stringent
requirements of the submicron design rule. The Micrascan II, which is
based on the production-proven Micrascan I platform, has an overlay
accuracy of better than 70 nanometers at 3 sigma. By coupling high
resolution, low distortion and a unique focusing and leveling capability
with a larger field size (22 mm x 32.5 mm), semiconductor manufacturers
can achieve higher yields while producing larger and more sophisticated
devices.

In addition to such advanced R&D applications as Samsung's 256 megabit
DRAM, the Micrascan II is also being used for R & D and pilot production
in some of the most advanced wafer fabs throughout the world.

About Silicon Valley Group Inc.: SVG is a leading manufacturer of automated
wafer processing equipment for the worldwide semiconductor industry and a
member of SEMI/SEMATECH, an independent organization of United
States-owned semiconductor equipment and materials suppliers. Its
sophisticated products include photoresist processing equipment;
oxidation, diffusion, and low-pressure chemical vapor deposition
processing systems; and photolithography exposure tools that utilize
step-and-scan technology. SVG is listed on the NASDAQ stock market under
the symbol SVGI.

Silicon Valley Group Inc
2240 Ringwood Ave
San Jose, CA 95131
408-434-0500,  fax 408-954-1233

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